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Fastmicro
Sample Scanner

Surface cleanliness validation according to ISO 14644-9. Particle counting in seconds, detection from 0.5 µm.

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Fastmicro Sample Scanner
specifications

Specifications
Sample Scanner

Imaging within seconds
Total workflow < 1 minute.
Qualification reports
With quantitative particle count.
Particle detection
0.5 µm and up.
Surface particle measurement
According to ISO 14644-9.
measurement workflow

Measurement workflow for the
Fastmicro Sample Scanner

Particle sampling on parts and in assemblies is possible on flat, curved and cavity surfaces.

Sampling

●

Sampling

Take a tape-lift sample from the part.

Processing

●●

Processing

Place the sampler on the scanner, imaging takes seconds.

Analysing

●●●

Analysing

Read particle count, size and position on screen.

detection range

Detection from
0.5 µm

PSL equivalent particles. The blue ones are the sizes the Sample Scanner detects.

0.1 µm

0.2 µm

0.3 µm

0.5 µm

1 µm

2 µm

5 µm

10 µm

0.5 µm

Detection from, PSL equivalent

> 90 %

Pick-up efficiency

> 90 %

Repeatability

how-to videos

A closer look at the
Fastmicro Sample Scanner

Some things are easier to show than to explain. How-to videos walk you through a task step by step, so you can see exactly what to do and how it should look when it’s done right.

The new standard in surface particle contamination measurements

Sampling workflow with PMC 2.0

Sampling workflow with SP Sampler

Witness wafer workflow

what our customers say

“We have confidence in the Fastmicro scanner to help us with finding an excellent quantification of the surface cleanliness of critical parts.”

Dr. Ir. L.H.A. Leunissen | ASML, Cleanliness Project Manager

Before migration to this new inspection tool, we saw a 50% variation in the particle count measurements. This is now reduced to less than 10% in combination with a particle detection limit that went down significantly by more than one order of magnitude to 0.5 micrometer.

As valued customer, I know that the integration of Fastmicro has allowed us to reach our required machine defectivity performance.

Besides accurate measurements, the tool offers ease of use and high throughput features. We appreciate the professional service and collaboration with Fastmicro to extend the capabilities of the tool further in the future.

Are you ready to level-up in
cleanliness control.

Contact us to start taking particle measurements in seconds.

contact us now