products • parts & equipment qualification
Fastmicro
Sample Scanner
Surface cleanliness validation according to ISO 14644-9. Particle counting in seconds, detection from 0.5 µm.
specifications
Specifications
Sample Scanner
Total workflow < 1 minute.
With quantitative particle count.
0.5 µm and up.
According to ISO 14644-9.
measurement workflow
Measurement workflow for the
Fastmicro Sample Scanner
Particle sampling on parts and in assemblies is possible on flat, curved and cavity surfaces.

●
Sampling
Take a tape-lift sample from the part.

●●
Processing
Place the sampler on the scanner, imaging takes seconds.

●●●
Analysing
Read particle count, size and position on screen.
detection range
Detection from
0.5 µm
PSL equivalent particles. The blue ones are the sizes the Sample Scanner detects.
0.1 µm
0.2 µm
0.3 µm
0.5 µm
1 µm
2 µm
5 µm
10 µm
0.5 µm
Detection from, PSL equivalent
> 90 %
Pick-up efficiency
> 90 %
Repeatability
how-to videos
A closer look at the
Fastmicro Sample Scanner
Some things are easier to show than to explain. How-to videos walk you through a task step by step, so you can see exactly what to do and how it should look when it’s done right.
The new standard in surface particle contamination measurements
Sampling workflow with PMC 2.0
Sampling workflow with SP Sampler
Witness wafer workflow
what our customers say
“We have confidence in the Fastmicro scanner to help us with finding an excellent quantification of the surface cleanliness of critical parts.”
Before migration to this new inspection tool, we saw a 50% variation in the particle count measurements. This is now reduced to less than 10% in combination with a particle detection limit that went down significantly by more than one order of magnitude to 0.5 micrometer.
As valued customer, I know that the integration of Fastmicro has allowed us to reach our required machine defectivity performance.
Besides accurate measurements, the tool offers ease of use and high throughput features. We appreciate the professional service and collaboration with Fastmicro to extend the capabilities of the tool further in the future.
Are you ready to level-up in
cleanliness control.
Contact us to start taking particle measurements in seconds.




